Dr. Stacey F. Bent

Stacey F. Bent is the Jagdeep and Roshni Singh Professor at Stanford University, where she is Professor of Chemical Engineering, Professor of Energy Science and Engineering, and Professor, by courtesy, of Chemistry, of Materials Science and Engineering, and of Electrical Engineering. She is currently serving as Chair of the Department of Chemical Engineering, and she previously held the position of Stanford's Vice Provost for Graduate Education and Postdoctoral Affairs. Bent obtained her B.S. degree in chemical engineering from UC Berkeley and her Ph.D. degree in chemistry from Stanford, and she was a postdoctoral fellow at AT&T Bell Laboratories. Prior to Stanford, she was a faculty member in the Department of Chemistry at New York University. Bent’s research interests are in the understanding of surface chemistry and materials synthesis and the application of this knowledge to a variety of problems in semiconductor processing, sustainable energy, and nanotechnology. She is recognized for groundbreaking work on area selective atomic layer deposition (ALD) and semiconductor surface functionalization. Her group’s current research program ranges from fundamental mechanistic studies of surface chemistry during film growth, to area selective ALD, to applications in extreme ultraviolet lithography, 2D electronics, and batteries. Bent has published over 350 peer-reviewed papers that have been cited over 30,000 times, holds 7 patents, and has presented nearly 400 invited talks. She has supervised 60 Ph.D. students and 35 postdoctoral scholars. Bent was elected to the U.S. National Academy of Engineering in 2020. She is also a Fellow of the American Chemical Society (ACS) and the American Vacuum Society (AVS). She is the recipient of the 2018 ACS Award in Surface Chemistry, the 2020 SRC Technical Excellence Award, the 2021 ALD Innovator Award, and the 2021 Braskem Award from the American Institute of Chemical Engineers (AIChE). She previously served as Associate Editor of Chemistry of Materials and is on the editorial advisory board of several journals in the chemical sciences.